MEMS device based on electro-thermal actuation1

Project description: You will independently design and model a MEMS device based on electro-thermal actuation. The device size needs to fit in a 0.5mm X 0.5mm X 0.5mm cubic box and operational driving DC voltage should be less than 5V. Deliverables: 1. A project proposal: max. 2 page; 2. Intermediate report: max. 3 pages 3. Final Report 1. NO PLAGIARISM IS ALLOWED IN THE PAPER. Reports: • Project proposal: briefly describe current research on MEMS device you propose and present the design and functional requirements of your MEMS device. Propose your device design (schematic only) and describe its working mechanism. • Intermediate report: describe details on such as selected materials, dimensions and provide whatever progress you have achieved by this report • Final report: combine the proposal and intermediate report with more details on layout, fabrication processes and modeling results. Modeling results must include at least following items: 3D model, mesh size info, boundary conditions, temperature distribution, thermal stress and displacement. Paper format requirements: • Title/Author and affiliation/Abstract (one page) • Main body (at least 8 pages not exceeding 12 pages) • References • Double space, font size 12, font style Calibri. • Figure size is no larger than 5 lines. NOTE: i have a proposal but it is not right, and it needs to be corrected NOTE: the program for this project is Comsol 5.2